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Reverse engineering of polymeric multilayers using AFM-based nanoscale IR spectroscopy and thermal analysis

Tom Eby, Usha Gundusharma, Michael Lo, Khoren Sahagian, Curtis Marcott, Kevin Kjoller

It is possible to obtain both infrared spectra and thermal analysis data of individual layers in a cross-sectioned multilayer film. Since both techniques are AFM-based, the topographical features can be readily linked to the spectroscopic and thermal data at a much higher spatial resolution than previously achievable.

Article  |  Issue 24/3 (2012)

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