TMC13 rate controller

The TMC13 deposition rate controller from Henniker Scientific is a multi-channel device that has been designed for repeatable, accurate control of film thickness and rate in vacuum-based thin film deposition processes. A touch-screen interface can be customised to suit a particular operator preference and can be operated in both automatic and manual modes, providing a direct display and control of film thickness, deposition rate and frequency value for up to six independent deposition sources. The device also includes shutter relays for each channel, two analogue inputs for connection of pressure gauges, two re-transmission analogue outputs as standard and an extensive and fully editable materials library.


Henniker Scientific Ltd
Issue: 24-03
RSN: 141

 

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