Umetrics announces the release of version 12 of FabStat, which combines multivariate techniques with semiconductor FDC know-how based on the SIMCA-P+ multivariate platform. It is a stand-alone application designed to seamlessly integrate into existing fab data management systems. It monitors the entire production line—each tool, wafer by wafer. When a fault occurs, it instantly identifies the out-of-control tool and points to the culprit signals. Features of this new version include handling of hierarchical models, supporting PLS models, supporting PLS-DA models and improved log messages.

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